Fishing – trapping – and vermin destroying
Patent
1990-12-31
1993-12-14
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437173, G01J 116, H01L 21268
Patent
active
052702227
ABSTRACT:
A sensor (210) for diagnosis and prognosis of semiconductor device fabrication processes measures specular, scattered, and total surface reflectances and transmittances of semiconductor wafers (124). The sensor (210) comprises a sensor arm (212) and an opto-electronic control box (214), for directing coherent electromagnetic or optical energy in the direction of semiconductor wafer (124). Opto-electronic control box (214) includes circuitry for measuring the amounts of laser powers coherently reflected from and transmitted through the semiconductor wafer (124) surface and the amounts of electromagnetic powers scatter reflected from and transmitted through the semiconductor wafer (124) surface. The present invention determines specular, scattered, and total reflectance and transmittance as well as surface roughness values for semiconductor wafer (124) based on measurements of coherent and scatter reflected and transmitted laser powers. The sensor (210) of the present invention can also provide a go
o-go test of semiconductor fabrication process quality. A process control computer associates with the sensor (210) to respond to spectral reflectance and transmittance measurements yielding surface roughness and thickness measurements as well as diagnosis/prognosis analysis results and control signals.
REFERENCES:
patent: 4332833 (1982-06-01), Aspnes et al.
patent: 5091320 (1992-02-01), Aspnes et al.
Gambino et al., "Microcircuit Processing Control by Optical Diffraction," IBM Tech. Disc. Bull., vol. 20, No. 2, Jul. 1977, pp. 781-783.
Chaudhuri Olik
Donaldson Richard L.
Ojan Ourmazd S.
Texas Instruments Incorporated
Valetti Mark A.
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