Ventilation hood with enhanced particle control and method of us

Details Ventilation hood with enhanced particle control and method of us Ventilation hood with enhanced particle control and method of us

1998-04-06

1999-06-22

Joyce, Harold

Ventilation

Workstation ventilator

Having inlet airway

134 21, 134902, B08B 1502

Patent

active

059137215

ABSTRACT:
An apparatus for cleaning a process chamber that includes a ventilation hood which has a fluid flow channel attached to an inner peripheral wall of the hood body equipped with a plurality of fluid nozzles pointing downwardly toward a process chamber cavity when the hood is positioned on such process chamber, and a method for using the apparatus. A purge gas flown through the fluid nozzles carries substantially all contaminating fumes or particles away from the process chamber cavity into an air evacuation system such as a factory vacuum exhaust system such that contamination of the process chamber can be essentially eliminated.

REFERENCES:
patent: 4755844 (1988-07-01), Tsuchiya et al.
patent: 5522412 (1996-06-01), Ohba et al.

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