Sub-micron bipolar devices with sub-micron contacts

Details Sub-micron bipolar devices with sub-micron contacts Sub-micron bipolar devices with sub-micron contacts

1990-05-25

1991-09-24

Hille, Rolf

357 231, 357 49, 357 59, 357 71, H01L 2972

Patent

active

050518054

ABSTRACT:
The sub-micron bipolar devices with method for forming sub-micron contacts provides a sub-micron bipolar device and process for manufacturing it with contacts down to 0.1 microns or less. All processes and devices utilize doped polysilicon as the electrodes for the device elements, and the preferred embodiment surrounds the polysilicon contacts with low temperature oxide covered by SOG to avoid all oxidation steps which otherwise might be detrimental to the extremely thin whisker contacts.

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