Process for preparing a two phase HFB.sub.2 -SIB.sub.4 material

Details Process for preparing a two phase HFB.sub.2 -SIB.sub.4 material Process for preparing a two phase HFB.sub.2 -SIB.sub.4 material

1997-03-26

1998-11-24

Beck, Shrive P.

Coating processes

Coating by vapor, gas, or smoke

Base includes an inorganic compound containing silicon or...

4272552, C23C 1638

Patent

active

058403671

ABSTRACT:
A chemical vapor deposition process comprising reacting HfCl.sub.4 with Bsub.3 and SiCl.sub.4 with BCl.sub.3 on a surface heated at 1100.degree. C. to 1300.degree. C. in a vacuum to produce a two phase HfB.sub.2 -SiB.sub.4 ceramic coating on the surface, wherein the HfCl.sub.4, SiCl.sub.4, and BCl.sub.3 reactants are deposited onto the heated surface from a vapor phase, and wherein H.sub.2 is used to dissociate the HfCl.sub.4, SiCl.sub.4 and BCl.sub.3 molecules.

REFERENCES:
patent: 3979500 (1976-09-01), Sheppard et al.
patent: 4022872 (1977-05-01), Carson et al.
patent: 5149514 (1992-09-01), Sanjuro

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