Optical surface roughness measuring apparatus using double-focus

Details Optical surface roughness measuring apparatus using double-focus Optical surface roughness measuring apparatus using double-focus

1990-05-03

1991-09-24

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250571, 356369, 359494, 359642, G02F 101, H01J 4014

Patent

active

050515756

ABSTRACT:
An optical surface roughness measuring apparatus for measuring roughness of a surface of a subject, by irradiating the surface with two linearly polarized beams of light which have orthogonal planes of polarization and different frequencies, and detecting a change in a beat frequency of the two beams reflected by the surface. The optical surface measuring apparatus includes a laser device for producing two linearly polarized laser beams as the two linearly polarized beams, and an optical device having a single optical path between the laser device and the surface of the subject, so that the two linearly polarized laser beams are propagated from the laser device toward the surface along the single optical path. The optical device includes a double-focus lens, and is operable for converging one of the two laser beams so as to irradiate a reading spot on the surface of the subject, and converting the other of the two laser beams into parallel ray of light for irradiating an area on the surface, the area being aligned with the reading spot and having a diameter larger than the reading spot.

REFERENCES:
Osipov, Binary Polarizing Lenses, Jan. 25, 1974, pp. 277-279.

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