Method of refining nitrogen trifluoride gas

Details Method of refining nitrogen trifluoride gas Method of refining nitrogen trifluoride gas

1991-01-10

1991-12-03

Lewis, Michael

Chemistry of inorganic compounds

Modifying or removing component of normally gaseous mixture

Halogenous component

55 71, 55 75, 423406, C01B 719, C01B 21083, B01D 5302

Patent

active

050698877

ABSTRACT:
The invention provides a selective adsorption method for refining NF.sub.3 gas containing CF.sub.4 as impurity. At a temperature not higher than 10.degree. C. the NF.sub.3 gas is brought into contact with a crystalline and porous synthetic zeolite, which is substantially uniform in pore size and about 4.9 .ANG. in effective pore size and is commerciallized under the name of molecular sieve 5A, on condition that the content of water of crystallinity in the synthetic zeolite is 1-10 wt. %, and preferably 6-10 wt. %. The synthetic zeolite efficiently adsorbs NF.sub.3 with little adsorption of CF.sub.4.

REFERENCES:
patent: 4156598 (1979-05-01), Woytek et al.
patent: 4193976 (1980-03-01), Lileck et al.
patent: 4543242 (1985-09-01), Aramaki et al.
patent: 4933158 (1990-06-01), Aritsuka et al.
patent: 4948571 (1990-08-01), Harada et al.

Affiliated with

Also associated with

Rating

Method of refining nitrogen trifluoride gas does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of refining nitrogen trifluoride gas, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of refining nitrogen trifluoride gas will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1695866