Semiconductor circuit components and capacitors

Details Semiconductor circuit components and capacitors Semiconductor circuit components and capacitors

1997-08-20

1999-06-08

Kincaid, Kristine

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361313, 3613215, 257296, H01G 406, H01G 420

Patent

active

059108800

ABSTRACT:
The invention pertains to semiconductor circuit components and capacitors. In another aspect, the invention includes a capacitor having a) a first capacitor plate; b) a first tantalum-comprising layer over the first capacitor plate; c) a second tantalum-comprising layer over the first tantalum-comprising layer, the second tantalum-comprising layer having nitrogen; and d) a second capacitor plate over the second tantalum-comprising layer. In another aspect, the invention includes a component having: a) a first tantalum-comprising layer; and b) a second tantalum-comprising layer over the first tantalum-comprising layer, the second tantalum-comprising layer having nitrogen.

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Eimori, T., et. al., "A Newly Designed Planar Stacked Capacitor Cell with High dielectric Constant Film for 256Mbit DRAM", 1993 IEEE, pp. 631-634.

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