Low temperature preparation of ultrafine oxide particles using o

Details Low temperature preparation of ultrafine oxide particles using o Low temperature preparation of ultrafine oxide particles using o

1988-12-22

1992-07-28

Morris, Theodore

Chemistry of inorganic compounds

Oxygen or compound thereof

Metal containing

423579, 423594, 502338, C01B 1314

Patent

active

051339552

ABSTRACT:
The present invention relates to a method for the preparation of ultrafine oxide particles using organized reaction media. Integrated circuit (IC) densities have necessitated the use of ultrahigh purity process fluids in state of the art fabrication facilities. It is the purpose of the present invention to synthesize monodispersed submicron particles of some representative contaminants, such as ultrafine oxide particles, using organized reaction media, and study their characteristics in relation to their removal from process fluids.

REFERENCES:
patent: 4333846 (1982-06-01), Lee et al.
patent: 4425261 (1984-01-01), Stenius et al.
patent: 4713233 (1987-12-01), Marsh et al.
patent: 4714692 (1987-12-01), Abrevaya et al.
patent: 4714693 (1987-12-01), Targos
patent: 4758414 (1988-07-01), Gifford et al.

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