Method of manufacturing a composite substrate and a piezoelectri

Details Method of manufacturing a composite substrate and a piezoelectri Method of manufacturing a composite substrate and a piezoelectri

1997-06-16

1999-06-08

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310346, 310348, H01L 4108

Patent

active

059106999

ABSTRACT:
A method of manufacturing a composite substrate and the composite substrate manufactured thereby wherein surfaces of first and second substrates having different thermal expansion coefficients are mirror finished and layered on each other. A first heat treatment is applied after which a part of the second substrate is removed to a depth sufficient to expose the first substrate. A final second heat treatment directly bonds the substrates.

REFERENCES:
patent: 5201977 (1993-04-01), Aoshima
patent: 5395788 (1995-03-01), Abe et al.
patent: 5525855 (1996-06-01), Gotoh et al.
patent: 5698471 (1997-12-01), Namba et al.

Affiliated with

Also associated with

Rating

Method of manufacturing a composite substrate and a piezoelectri does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of manufacturing a composite substrate and a piezoelectri, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing a composite substrate and a piezoelectri will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1684987