Method of preparing InSb thin film

Coating processes – Direct application of electrical – magnetic – wave – or... – Electrostatic charge – field – or force utilized

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427475, 427560, 427601, 427561, 427566, 427596, 4271261, 427190, 427203, 4272481, 20419225, B05D 104, B05D 136, H05C 100, B06B 100

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054947111

ABSTRACT:
Disclosed herein is a method of preparing an InSb thin film, which comprises a step of physically sticking InSb powder onto a major surface of a substrate, and a step of depositing an InSb thin film on the major surface of the substrate provided with the as-stuck InSb powder by a method such as vacuum evaporation.

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patent: 4713257 (1987-12-01), Luttermoller
patent: 4808432 (1989-02-01), Hajek
patent: 5113473 (1992-05-01), Yoshida et al.

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