Method of making a compliant fluid-impermeable element

Details Method of making a compliant fluid-impermeable element Method of making a compliant fluid-impermeable element

1989-04-26

1990-08-21

Childs, Sadie

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

20419214, 20419215, 427 47, 427124, 427125, 427250, 4272557, 427404, 427427, B05D 306, B05D 512

Patent

active

049504991

ABSTRACT:
A compliant sealing material with low or no gas permeability and low spring rate is made by coating a metal such as gold, on the surface of a polymer sheet. The metal acts as a complete gas barrier on an atomic level, and the polymer provides structural integrity and mounting attributes without detrimentally increasing compliance. A small number of metal atoms injected at a moderate energy into the near surface of the polymer act as link sites for joining subsequent lower energy atoms forming an impermeable layer. The total heat delivery to the polymer is minimized thereby preserving integrity and continuity. The material is particularly useful in micromechanical devices where high flexibility is needed with complete sealing.

REFERENCES:
patent: 3002847 (1961-10-01), Shaffer et al.
patent: 3558290 (1971-01-01), Baier et al.
patent: 3840391 (1974-10-01), Spitz et al.
patent: 4028206 (1977-06-01), King
patent: 4112190 (1978-09-01), Sato et al.
patent: 4332838 (1982-06-01), Wegrzyn
patent: 4522844 (1985-06-01), Khanna et al.
patent: 4612216 (1986-09-01), Kurfman
patent: 4720401 (1988-01-01), Ho et al.
Roberts et al., "Increase of Gold-Teflon FEP Joint Strength by Removal of Deposited Aluminum Prior to Gold Deposition for Electret Applications", Journal of Appl. Polymer Science, vol. 20, pp. 255-265, 1976.
Mattox, "Adhesion and Surface Preparation" Deposition Technologies for Films and Coatings, Chapter 3, pp. 74-81, 1982.
Chopra, "Mechanical Effects in Thin Films", Thin Film Phenomena, pp. 316-319, 1979.

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