Photoelectric conversion device

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357 4, 357 59, 357 15, H01L 2712, H01L 2948, H01L 2714, H01L 2904

Patent

active

048110698

ABSTRACT:
A photoelectric conversion device comprises a photodiode comprising a metallic electrode formed of a metal capable of forming a Schottky junction together with amorphous silicon, such as Cr or Ni, a transparent electrode formed of ITO or the like, and an i-type hydrogenated amorphous silicon layer sandwiched in between the metallic electrode and the transparent electrode. A bias voltage is applied across the metallic electrode and the transparent electrode so that the metallic electrode is biased to a negative potential relative to the transparent electrode. A Schottky barrier formed in the interface between the metallic electrode and the i-type hydrogenated amorphous silicon layer is used as an electron blocking layer. Thus, the dark current is suppressed on a low level and the photoelectric conversion device is able to operate at a high S/N ratio.

REFERENCES:
patent: 4419696 (1983-12-01), Hamano et al.
patent: 4523214 (1985-06-01), Hirose et al.
IEEE Transactions on Components, Hybrids and Manufacturing Tech. vol. CHMT-7 No. 4, 12/84, "High Speed and High Resolution . . . Photodetector Array" K. Suzuki et al., pp. 423-428.

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