Method of making lateral components in power semiconductor devic

Semiconductor device manufacturing: process – Making regenerative-type switching device – Altering electrical characteristic

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H01L 21332

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059941715

ABSTRACT:
A method for adjusting the gain or the sensitivity of a lateral component formed in the front surface of a semiconductor wafer, having a first conductivity type, includes not doping or overdoping, according to the first conductivity type, the back surface when it is desired to reduce the gain or sensitivity of the lateral component, and doping according to the second conductivity type, the back surface, when the gain or the sensitivity of the lateral component is to be increased.

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IEEE Transactions on Electron Devices, vol. 24, No. 3, Mar. 1977, New York, US, pp. 205-214, K.N. Bhat and M.K. Achuthan, "Current-Gain Enhancement in Lateral p-n-p Transistors by Optimized Gap in the n+ Buried Layer".
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