Pressure sensor assembly

Measuring and testing – Fluid pressure gauge – Diaphragm

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Details

73DIG4, 361283, G01L 708, G01L 912

Patent

active

047036583

ABSTRACT:
A pressure sensor assembly includes a pressure transducer having a pressure displaceable diaphragm bonded to a base. Displacement of the diaphragm results in varying of electrical characterisitcs of the transducer in response to sensed pressure. Electrical output connections (wires) of the transducer extend from a central portion of a top surface of the base, which faces the diaphragm, to a central portion of a base bottom surface and peripheral portions of the diaphragm and base top surface are hermetically bonded together. The transducer is mounted on a carrier plate and integral extensions of the electrical output connections pass through holes in the carrier plate. A housing for the sensor assembly has an opening therein to provide access to the diaphragm by ambient atmosphere/fluid surrouding the housing. A first inner seal bonds at least the peripheral portions of the base bottom surface to the carrier plate, and a second outer seal is positioned between the carrier plate top surface and walls of the housing. The housing walls, carrier plate and first and second seals form an effective seal against ambient atmosphere/fluid which contacts the diaphragm and, therefore, seal and protect the electrical output connections of the transducer. The housing walls form an internal cavity which is isolated from the sensed ambient atmosphere/fluid. Within the internal cavity components are connected to the extensions of the clectrical output connections which pass through the carrier plate holes.

REFERENCES:
patent: 4380041 (1983-04-01), Ho
patent: 4617606 (1986-10-01), Shak et al.

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