Method of adjusting bridge circuit of semiconductor pressure sen

Details Method of adjusting bridge circuit of semiconductor pressure sen Method of adjusting bridge circuit of semiconductor pressure sen

1987-10-20

1989-03-07

Noland, Tom

Measuring and testing

Instrument proving or calibrating

Volume of flow, speed of flow, volume rate of flow, or mass...

73727, 338 4, G01L 2700

Patent

active

048095362

ABSTRACT:
A method of adjusting a bridge circuit of a semiconductor pressure sensor comprises the steps of providing conductive lines connected to at least one of diffused resistors at predetermined intervals during the wiring process, the diffused resistors being provided to connect strain gauge resistors constituting the bridge circuit; adjusting the resistance value of at least the one of the diffused resistors; making vacuum suction to the back surface of a diaphragm of the semiconductor pressure sensor in the testing process to make a state wherein pressure is virtually applied to the diaphragm from the surface side thereof; measuring the pressure sensitivity of the semiconductor pressure sensor from the surface side of the diaphragm by making use of the bridge circuit; and adjusting the resistance value of at least the one of the diffused resistors based on the pressure sensitivity thus measured to adjust the balance of the bridge circuit.

REFERENCES:
patent: 3899766 (1975-08-01), Mermelstein
patent: 4173148 (1979-11-01), Yamada et al.
patent: 4174639 (1979-11-01), Raven
patent: 4411158 (1983-10-01), Schaff, Jr.
patent: 4565097 (1986-01-01), Dineff
patent: 4611129 (1986-09-01), Ishihors

Affiliated with

Also associated with

Rating

Method of adjusting bridge circuit of semiconductor pressure sen does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of adjusting bridge circuit of semiconductor pressure sen, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of adjusting bridge circuit of semiconductor pressure sen will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1660224