Pyroelectric IR sensor using an oxide superconductor upper elect

Details Pyroelectric IR sensor using an oxide superconductor upper elect Pyroelectric IR sensor using an oxide superconductor upper elect

1992-12-28

1994-10-11

King, Roy V.

Superconductor technology: apparatus, material, process

High temperature devices, systems, apparatus, com- ponents,...

Measuring or testing system or device

505701, 505191, 2503383, 2503381, 2503362, 427 62, G01J 500, H01L 3900

Patent

active

053547322

ABSTRACT:
An electrode in an electronic device using a functional thin film facilitates epitaxial growth during the functional material film-forming process and prevents the generation of cracks due to thermal stress. An oxide superconductor is using as an electrode material, thereby forming the crystal structure identical with the crystal structure of a functional thin film, and rendering their lattice constant and coefficient of thermal expansion close to the lattice constant and coefficient of thermal expansion functional thin film. According to the electrode material, high electric conductivity, low thermal conductivity and large thermal absorption coefficient characteristics can also be obtained.

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Tabata et al, "Preparation of PbTiO.sub.3 thin films by an Excimer laser ablation technique with second laser irradiation", Jpn. J. Appl. Phys. vol. 31(9B) Sep. 1992 pp. 2968-2970.
Masanori Okuyama et al., "Room-Temperature-Operated Infrared Image CCD Sensor Using Pyroelectric Gate Coupled by Dielectric Connector", May 1991, IEEE Transactions on Electron Devices, vol. 38, No. 6, pp. 1145-1151.

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