Far ultraviolet dielectric multilayer film

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350166, G02B 528, G02B 522

Patent

active

043209360

ABSTRACT:
A far ultraviolet dielectric multilayer film is disclosed which is composed of a first group of films on a substrate and a second group of films overlaid on the first group of films. The first group of films comprises alternate layers of a high refractive index dielectric which absorbs rays in the ultraviolet region and a low refractive index dielectric. The second group of films comprises alternate layers of an intermediate refractive index dielectric which does not absorb rays in ultraviolet region and a low refractive index dielectric.

REFERENCES:
patent: 3247392 (1966-04-01), Thelen
patent: 3853386 (1974-12-01), Ritter et al.
Aleksandrou, U. A. et al., "Optical Properties of Zirconium Dioxide in the Infrared Region", Opt. Spectrose, vol. 40, No. 6, Jun. 1978, pp. 627-628.
So, S. S. et al., "Optical Constants of Silicon at 5461 A", JOSA, vol. 62, No. 4, Apr. 1972, pp. 596-598.

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