Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1989-10-10
1991-05-14
Schor, Kenneth M.
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
2504923, 156643, 427 37, 437228, C23F 102
Patent
active
050153234
ABSTRACT:
A tool consists of an array of field-emitting nanostructure probe tip extensions on the end of a metal probe. The probe is tapered to a long, narrow, flat end with typical dimensions of 1 cm.times.1 .mu.m. The probe tip extensions typically extend approximately 100 .ANG. beyond the probe surface and their ends are shaped to act as independent field-emission tips, each at an exact atomic location. These ends are a single crystal plane terminating in a single crystal unit plane cell having a central atom with a lower work function than the atoms surrounding the central atom. The nanostructures are spaced in a prescribed, repeating pattern with typical spacings on the order of 400 .ANG.. The probe voltage, current and position, as well as CVD or etching gas pressures, are sequentially adjusted to fabricate nanostructures on a nearby substrate, which is typically 10-30 .ANG. below the termination points of the probe tip extensions.
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Blumenthal David A.
Bruckner John J.
Englert Alvin J.
Schor Kenneth M.
The United States of America as represented by the Secretary of
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