Capacitor charging sensor

Details Capacitor charging sensor Capacitor charging sensor

1998-06-18

2000-11-07

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2504921, 250310, 250397, H01J 37304

Patent

active

06144037&

ABSTRACT:
A system for detecting charge accumulation during semiconductor wafer manufacturing including a sensor comprising a capacitor, an emitter for directing a primary electron beam toward the sensor, wherein the primary electron beam causes the sensor to emit secondary electrons and a detector for measuring the secondary electrons.

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