Method of fabricating flat FED screens

Details Method of fabricating flat FED screens Method of fabricating flat FED screens

1997-10-02

2000-03-14

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 50, H01J 902

Patent

active

060365668

ABSTRACT:
The microtips of charge emitting material, which define the cathode of the flat FED screen and face the grid of the screen, are tubular and have portions with a small radius of curvature. The microtips are obtained by forming openings in the dielectric layer separating the cathode connection layer from the grid layer, depositing a conducting material layer to cover the walls of the openings, and anisotropically etching the layer of conducting material to form inwardly-inclined surfaces with emitting tips. Subsequently, the portions of the dielectric layer surrounding the microtips are removed.

REFERENCES:
patent: 4857161 (1989-08-01), Borel et al.
patent: 5315206 (1994-05-01), Yoshida
patent: 5457355 (1995-10-01), Fleming et al.
patent: 5714837 (1998-02-01), Zurn et al.
patent: 5769679 (1998-06-01), Park et al.
patent: 5865659 (1999-02-01), Ludwig et al.
European search report from European application No. 96 830509.4, filed Oct. 4, 1996.

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