Precision specular proximity detector and article handing appara

Details Precision specular proximity detector and article handing appara Precision specular proximity detector and article handing appara

1982-05-10

1984-07-03

Howell, Janice A.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

414331, 350433, G01P 1300, B65H 714

Patent

active

044581521

ABSTRACT:
Infrared radiation is focused to a line at a site at which a semiconductor wafer is expected to appear when a wafer is transferred with, i.e., loaded onto or unloaded from, a semiconductor wafer conveyor. A cylindrical lens of selected focal length is positioned to receive and focus to a line at an image plane radiation reflected by a wafer arriving at the site. An apertured stop defines an opening at the image plane to pass reflected radiation to an infrared sensor positioned on the side of the stop opposite the cylindrical lens.

REFERENCES:
patent: 3902615 (1975-09-01), Levy et al.
patent: 4044250 (1977-08-01), Fetzer
J. W. Sedlak, "Sensing of Carrier Supported Wafers," IBM Technical Disclosure Bulletin, vol. 12, No. 1, (Jun. 1969), p. 183.

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