Modular processing apparatus for processing semiconductor wafers

Details Modular processing apparatus for processing semiconductor wafers Modular processing apparatus for processing semiconductor wafers

1986-05-19

1988-02-02

Bueker, Richard R.

Coating apparatus

Gas or vapor deposition

414217, 414222, 414287, C23C 1400

Patent

active

047222980

ABSTRACT:
A self-contained modular processing apparatus is disclosed for processing workpieces, and in particular, silicon wafers. The apparatus is constructed of framed modules which plug into a service facility docking subassembly and interlock therewith to make up a complete modular processing system for wafer processing. Each module may be provided with its own wafer transporting mechanism and includes a built-in CPU such that each module is an independent, stand-alone processing unit. Each processing unit, by being capable of independent operation, functions as a building block to configure a modular processing system capable of handling wafer flow in multiple directions while performing a multitude of processing functions or operations. Individual modules are arranged along a line of single fold symmetry such that a single transport mechanism may be employed for transferring wafers among adjacent modules.

REFERENCES:
patent: 3823836 (1974-07-01), Cheney et al.
patent: 4062463 (1977-12-01), Hillman et al.
patent: 4255075 (1981-03-01), Babbitt
patent: 4261808 (1981-04-01), Walter
patent: 4433951 (1984-02-01), Koch et al.
patent: 4465416 (1984-08-01), Burkhalter
patent: 4483651 (1984-11-01), Nakane et al.
patent: 4498416 (1985-02-01), Bouchaib
patent: 4500407 (1985-02-01), Boys et al.
patent: 4501527 (1985-02-01), Jacoby et al.
patent: 4553069 (1985-11-01), Purser
patent: 4587002 (1986-05-01), Bok
patent: 4592306 (1986-06-01), Gallego

Affiliated with

Also associated with

Rating

Modular processing apparatus for processing semiconductor wafers does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Modular processing apparatus for processing semiconductor wafers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Modular processing apparatus for processing semiconductor wafers will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1631481