Synchronous positioning control apparatus and control method the

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36416702, 36416706, 3641671, G05B 1918

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058123962

ABSTRACT:
A synchronous positioning control apparatus for servo-controlling positions of a plurality of stages in different feedback loops in order to synchronously control each of the stages, includes a synchronization compensator in which a feedback loop of each of the stages is supplied with position information of at least one of the other stages. Even when any of the plurality of stages is affected by a disturbance, synchronization performance of the stages can be improved by the present invention.

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