Fishing – trapping – and vermin destroying
Patent
1992-01-21
1994-05-31
Maples, John S.
Fishing, trapping, and vermin destroying
437194, 437228, 148DIG50, H01L 21441, H01L 21465
Patent
active
053169751
ABSTRACT:
A method is disclosed for producing integrated circuit apparatus in which electroconductive interconnection films are disposed adjacent to each other and have an insulating film sandwiched therebetween. The electroconductive films are electrically connected with each other via a through-hole formed in the insulating film. First, a through-hole is formed in an insulating film so as to extend to the surface of a first electroconductive interconnection film. Then, extraneous materials existing on the surfaces of the insulating film and the electroconductive film exposed in the through-hole are removed by a sputter etching method. Next, an insulating film covering film ("covering film") is formed by a sputtering method on said insulating film by using a material which is the same material that is used for forming a second electroconductive interconnection film. Subsequently, the sputter etching method is used again to remove the covering film. Finally, the second electroconductive interconnection film is formed on the insulating film and makes electrical contact with the first electroconductive film via the through-hole.
REFERENCES:
patent: 4902645 (1990-02-01), Ohba
patent: 5081064 (1992-01-01), Inoue et al.
Maples John S.
NEC Corporation
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