Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Patent
1995-06-05
1998-10-27
Dziarzynski, Paul M.
Optical: systems and elements
Deflection using a moving element
Using a periodically moving element
359207, 359206, 359205, 359210, 347256, 347258, G02B 2608, B41J 247
Patent
active
058284818
ABSTRACT:
A Mid-Objective scanner system for correcting astigmatism, bow distortion and field curvature including a tilted lens or a toric lens for producing an opposite amount of astigmatism to correct astigmatism, a scanning mechanism and a concave cylindrical mirror for directing the scanned beam onto to a workpiece wherein the concave cylindrical mirror has a radius of curvature that corrects the field of curvature in the image plane of the workpiece and thereby enables the scanner system to correct astigmatism, bow distortion and field curvature.
REFERENCES:
patent: 4588269 (1986-05-01), Kessler
patent: 5255113 (1993-10-01), Yoshikawa et al.
patent: 5504613 (1996-04-01), Itabashi et al.
Cobb Joshua Monroe
Flattery-Freedenberg Candace Joy
Topolovec Franz X.
Ziemins Uldis Artis
Ahsan Aziz M.
Chang Audrey
Dziarzynski Paul M.
International Business Machines - Corporation
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