Photoelectric position-measuring arrangement having a plurality

Details Photoelectric position-measuring arrangement having a plurality Photoelectric position-measuring arrangement having a plurality

1989-03-22

1991-04-23

Turner, Samuel

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

250237G, G01B 902

Patent

active

050095064

ABSTRACT:
A position measuring arrangement is disclosed which comprises a three-grid measuring system. A first grid is illuminated under an angle .alpha.. Two partial beams result from diffraction on the first grid. the two partial beams impinge on a second grid, which may be the scale of the position-measuring arrangement. Diffraction of the partial-beams on the second grid result in four partial-beams of which the two partial-beams lying closest to the grid normal impinge upon a third grid. The third grid again diffracts the partial-beams and brings them into interference. The partial-beams which are intensity-modulated by interference by the third grid impinge upon photodetectors, by which they are transformed into phase-shifted electric signals and fed to and evaluated arrangement.

REFERENCES:
patent: 3738753 (1973-06-01), Huntley
patent: 4776701 (1988-10-01), Pettigrew

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