Micromechanical device manufactured out of incompatible material

Details Micromechanical device manufactured out of incompatible material Micromechanical device manufactured out of incompatible material

1995-06-07

1997-02-18

Phan, James

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359230, 359298, 216 24, G02B 2608

Patent

active

056046251

ABSTRACT:
A method of preventing adhesion of contacting surfaces of micro-mechanical devices (10). Two materials are selected that are incompatible in the sense that they have at least low solid solubility and preferably, an inability to alloy. One of these materials is used as the first contacting surface (11), and the other as the second contacting surface (17).

REFERENCES:
patent: 5061049 (1991-10-01), Hornbeck
patent: 5331454 (1994-07-01), Hornbeck
Rabinowicz, "Summer Session 2.81s Tribology", Notes from Summer School Class at MIT, Jul. 12-16,1993.

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