Fishing – trapping – and vermin destroying
Patent
1985-09-24
1987-10-20
Hearn, Brian E.
Fishing, trapping, and vermin destroying
148DIG106, 437 84, 437 41, H01L 21312
Patent
active
047004584
ABSTRACT:
A method for manufacturing thin-film transistor comprises steps of sequentially forming in laminar state a gate film, an insulating film and a conductive film having a transparent electrode film and an amorphous silicon film added with an impurity thereto on the top surface of glass substrate or layer; irradiating ultraviolet ray from the bottom surface side of the substrate to expose negative photoresist film on said conductive film and to etch the same; and forming an amorphous semiconductive film on the structure. In this manner, source and drain electrodes are respectively self-aligned with the gate electrode and contacted therewith through a semiconductive film and a low resistive and semiconductor film.
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Aoki Toshio
Ikeda Mitsushi
Suzuki Kouji
Hearn Brian E.
Quach T. N.
Tokyo Shibaura Denki Kabushiki Kaisha
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