Semiconductor device and method of manufacturing without undercu

Details Semiconductor device and method of manufacturing without undercu Semiconductor device and method of manufacturing without undercu

1995-04-19

1997-02-18

Prenty, Mark V.

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified configuration

257758, 257508, H01L 23485

Patent

active

056043813

ABSTRACT:
Undercutting of conductive lines in a dense array on a dielectric layer containing an open field is prevented by providing one or more non-functional components, such as one or more non-functional conductive lines, in the dielectric layer under the dense array of conductive lines.

REFERENCES:
patent: 4916514 (1990-04-01), Nowak

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