Silicon micromachined non-elastic flow valves

Details Silicon micromachined non-elastic flow valves Silicon micromachined non-elastic flow valves

1987-10-19

1988-09-06

Rosenthal, Arnold

Valves and valve actuation

Reciprocating valve

Diaphragm

251368, 29157C, 291571R, 29DIG16, 2391021, F16K 714, B05B 102

Patent

active

047687517

ABSTRACT:
A valve assembly for controlling fluid flow includes a valve plate and a nozzle plate which are not attached to each other but can be moved into and out of contact with each other. The valve plate has an opening for passing an actuator and fluid. A nozzle plate has an opening for passing fluid and the opening is aligned with a mesa on the valve plate which can seal the nozzle orifice. The actuator separates the nozzle plate from the valve plate to permit fluid flow and a spring means brings the nozzle plate into a closed position against the valve plate to stop fluid flow.

REFERENCES:
patent: 1243122 (1917-10-01), Winters
patent: 3921916 (1975-11-01), Bassous
patent: 4157935 (1979-06-01), Solyst
patent: 4455192 (1984-06-01), Tamai
patent: 4538642 (1985-09-01), Schutten et al.
patent: 4581624 (1986-04-01), O'Connor
patent: 4628576 (1986-12-01), Giachino et al.
patent: 4647013 (1987-03-01), Giachino et al.
"Fabrication of Novel Three-Dimensional Microstructures by the Anisotropic Etching of (100) and (110) Silicon", by E. Bassous, IEEE Transactions on Electron Devices, vol. ED-25, No. 10, Oct. 1978, pp. 1178-1185.

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