Process for thin film formation

Details Process for thin film formation Process for thin film formation

1995-06-07

1997-02-18

Kunemund, Robert

Fishing, trapping, and vermin destroying

437187, H01L 21285

Patent

active

056041535

ABSTRACT:
A process for thin film formation comprises selectively irradiating with an energy ray a substrate to the surface of which a surface treatment for providing hydrogen atoms is applied to thereby form an irradiated region and a non-irradiated region on the surface of the substrate, and forming a thin film selectively on the non-irradiated region.

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