Fishing – trapping – and vermin destroying
Patent
1995-05-19
1997-02-18
Dang, Trung
Fishing, trapping, and vermin destroying
437 7, 437974, 437901, H01L 21265
Patent
active
056041446
ABSTRACT:
A method for fabricating semiconductor device comprises the steps of providing a substrate formed from a semiconductor material of a first conductivity type and converting a selected portion of the substrate to a porous semiconductor material. This partially forms a membrane-like structure of non-porous semiconductor material on the substrate. The porous semiconductor material is then oxidized to form a rigid layer of oxide material under the partially formed membrane-like structure. After forming the porous oxide material one or more integrated circuit elements can be fabricated on the partially formed membrane-like structure without fracturing it because rigid layer of oxide material operates to support it during the fabrication of the integrated circuit elements. Once the integrated circuit elements are fabricated, all or part of the rigid layer of oxide material is removed to complete the membrane-like structure and allow it to deflect in response to a force applied thereto.
REFERENCES:
patent: 4003127 (1977-01-01), Jaffe et al.
patent: 4070230 (1978-01-01), Stein
patent: 5294559 (1994-03-01), Malhi
Dang Trung
Kulite Semiconductor Products Inc.
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