Apparatus for detecting the defect of pattern

Details Apparatus for detecting the defect of pattern Apparatus for detecting the defect of pattern

1982-07-22

1984-10-23

Britton, Howard W.

Facsimile and static presentation processing

Facsimile

Specific signal processing circuitry

358101, 358107, 382 8, 382 48, H04N 718

Patent

active

044791453

ABSTRACT:
A pattern examining in which a pattern on an examined object such as reticle or mask is scanned to produce image binary signals of picture elements; binary information corresponding to a local area on the examined object is serially extracted from the image binary signals; and shape detection is effected for detecting by means of the binary information whether or not the pattern in the local area possesses a determined geometric shape or characteristics. The result of the shape detection is compared with the information on design relating to the geometric shape or characteristics which the pattern on the examined object should possess.

REFERENCES:
patent: 4238780 (1980-12-01), Doemens
patent: 4364086 (1982-12-01), Guth
patent: 4390955 (1983-06-01), Arimura

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