Epidark illumination system

Details Epidark illumination system Epidark illumination system

1982-03-05

1984-10-09

Punter, William H.

G02B 2110

Patent

active

044757964

ABSTRACT:
An Epidark illumination system wherein an optical member for forming the image of a light source is provided in a dark field light path to illuminate a sample with the light from the image of the light source in order to be able to make a uniform bright illumination with a simple formation. The optical member can be any of a ring-shaped convex lens or concave lens, a ring-shaped multi-element lens made by arranging a plurality of convex lenses or concave lenses in the same plane, a compound cylindrical lens made by concentrically circularly arranging cylindrical lenses, a radial lens and a multi-element lens made by arranging a plurality of concentric ring-shaped lenses so that the surfaces of the lenses may be higher in turn outward from the center. Further, a light collecting lens or a light collecting mirror may be arranged in the dark field light path.

REFERENCES:
patent: 2097762 (1937-11-01), Heine
patent: 2809554 (1957-10-01), Bernhardt
patent: 3857626 (1974-12-01), Rosenberger at al.
Makosch et al., "Dark-Field Illuminator", IBM Tech. Disc. Bull., 6-1978, p. 226.

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