Field emission device with tilted cathodes

Details Field emission device with tilted cathodes Field emission device with tilted cathodes

1997-06-18

2000-05-02

O'Shea, Sandra

Electric lamp and discharge devices

With luminescent solid or liquid material

Vacuum-type tube

313309, 313336, 313351, 313238, H01J 102, H01J 162

Patent

active

060576421

ABSTRACT:
A field emission device is provided, which is able to prevent the inclination of emission direction of electrons. An insulating layer is formed on a first main surface of a substrate. A conductive layer with a gate electrode part and an interconnection part is selectively formed on the insulating layer. A second conductive layer is formed on the second main surface of the substrate. The first part has a window to expose the insulating layer. The insulating layer has a hole to expose the first main surface of the substrate. The hole is located just below the window of the conductive layer. A conical cathode is formed on the exposed first main surface of the substrate in the bole. The central axis of the cathode, which penetrates the tip of the cathode, is tilted with respect to a normal of the second conductive layer toward an opposite side to the interconnection part of the conductive layer. The direction of the emitted electrons is approximately parallel to the normal of the second conductive layer.

REFERENCES:
patent: 4940916 (1990-07-01), Borei et al.
patent: 5019003 (1991-05-01), Chason
patent: 5578901 (1996-11-01), Blanchet-Fincher et al.
Gray et al; "A Vacuum Field Effect Transistor Using Silicon Field Emitter Arrays"; 1986; pp. 776-779; Naval Research Laboratory; IEDM Technical Digest.
Spindt et al., "Physical Properties of Thin-Film Field Emission Cathodes with Molybdenum Cones"; Dec. 1976; pp. 5248-5263; Journal of Applied Physics, vol. 47, No. 12.

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