Polishing apparatus with carrier head pivoting device

Details Polishing apparatus with carrier head pivoting device Polishing apparatus with carrier head pivoting device

1998-05-19

2000-05-02

Hail, III, Joseph J.

Abrading

Machine

Rotary tool

451 41, B24B 722

Patent

active

060566302

ABSTRACT:
The present invention provides a unique polishing apparatus, such as a chemical/mechanical polishing apparatus, that includes a pivoting apparatus having a first end coupled to a carrier head and a second end coupled to a rotatable shaft wherein the pivoting apparatus is configured to exert a pivoting force with respect to the carrier head to pivot the carrier head with respect to the rotatable shaft to more easily break the surface tension formed by the slurry during the polishing process. This system provides a polishing apparatus that can reduce the amount of semiconductor wafer breakage associated with present processes and apparatus.

REFERENCES:
patent: 4271635 (1981-06-01), Szalay
patent: 5016399 (1991-05-01), Vinson
patent: 5121572 (1992-06-01), Hilscher
patent: 5365700 (1994-11-01), Sawada et al.
patent: 5645473 (1997-07-01), Togawa et al.
patent: 5653624 (1997-08-01), Ishikawa et al.
patent: 5655954 (1997-08-01), Oishi et al.
patent: 5676590 (1997-10-01), Hiraoka
patent: 5679055 (1997-10-01), Greene et al.

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