Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1990-11-07
1992-04-21
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
250560, 356369, G02F 101
Patent
active
051071053
ABSTRACT:
A method for measuring an unknown parameter, such as a refractive index, absorption coefficient and film thickness of the uppermost layer of a multi-layered film formed on a substrate whose refractive index and absorption coefficient are known, the refractive index, absorption coefficient, and film thickness of the other layer or layers than the uppermost layer on the multi-layered film being known, and at least one of the refractive index n.sub.1, absorption coefficient k.sub.1 and film thickness d.sub.1 of the uppermost layer being unknown, includes the step of measuring the reflectances, the step of specifying the functions containing unknown parameters, and the step of numerically solving the equation.
REFERENCES:
patent: 4672196 (1987-06-01), Canino
patent: 4695162 (1987-09-01), Itonaga
patent: 4806776 (1989-02-01), Kley
patent: 4906844 (1990-03-01), Hall
US-Z. Applied Optics 19, 1980, S. 1031-1032.
NL-Z. Philips Technische Rundschau 35, 1975, S. 70-71.
US-Z. IEEE Transactions on Microwave Theory and Techniques, vol. MTT-23, Jan. 1975, S. 176-177.
US-Z. IBM J. Res. Develop., May 1973, S. 256-262.
GB-Z. J. Phys. E 6, 1973, S. 48-50.
US-Z. Applied Optics 10, 1971, S. 2344-2349.
Nelms David C.
Ricoh & Company, Ltd.
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