Oriented conductive film and process for preparing the same

Details Oriented conductive film and process for preparing the same Oriented conductive film and process for preparing the same

1996-03-18

1997-08-12

Utech, Benjamin

Stock material or miscellaneous articles

All metal or with adjacent metals

Composite; i.e., plural, adjacent, spatially distinct metal...

428629, 428655, 428700, 428701, 428702, 117947, H01L 2912

Patent

active

056563825

ABSTRACT:
An oriented conductive thin film useful as a thin film electrode or a thin film resistor is disclosed, comprising an epitaxial or oriented ABO.sub.3 type oxide (e.g., BaPbO.sub.3) conductive thin film which is obtained by coating a single crystal oxide substrate or a single crystal semiconductor substrate with a solution of a metal oxide precursor comprising an organometallic compound, thermally decomposing the coating layer, followed by annealing. An epitaxial or oriented ABO.sub.3 type ferroelectric thin film may further be provided on the conductive thin film.

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