Plasma generating apparatus and method for extreme-ultaviolet la

Details Plasma generating apparatus and method for extreme-ultaviolet la Plasma generating apparatus and method for extreme-ultaviolet la

1992-07-14

1994-03-08

Bovernick, Rodney B.

Coherent light generators

Short wavelength laser

372 55, H01S 330

Patent

active

052933962

ABSTRACT:
A plasma generating apparatus for an extreme-ultraviolet laser that can generate high temperature plasma at high efficiency, and can form long plasma to be recombined by rapid cooling of the high temperature plasma. A shield plate including a narrow slit is disposed adjacent to a high temperature plasma source, and the high temperature plasma is discharged through the slit. Both high efficiency plasma generation and rapid expansion thereof can be simultaneously achieved by discharging high temperature plasma through the narrow slit. The rapid expansion makes it possible to form a long plasma having a large gain in an extreme-ultraviolet region. The high temperature plasma source can be readily realized by irradiating it with an exciting laser beam from behind the opposite side of the slit with regard to the high temperature plasma source directly or through a transmitting window. A closure provided in front of the slit can prevent a liquid or gas from flowing out of the slit before it is changed into plasma. This makes it possible to use a liquid or gas as a plasma source material.

REFERENCES:
patent: 4229708 (1980-10-01), Mani et al.
patent: 4258334 (1981-03-01), McCusker et al.
patent: 4369514 (1983-01-01), Silfvast et al.
patent: 4441189 (1984-04-01), Macklin et al.
patent: 4592064 (1986-05-01), Silfvast
patent: 4771430 (1988-09-01), Suckewer et al.
patent: 4862100 (1989-08-01), Lavarini et al.
patent: 4870653 (1989-09-01), Sher et al.
patent: 4945546 (1990-07-01), Gole et al.
patent: 5003543 (1991-03-01), Morsell et al.
patent: 5117432 (1992-05-01), Nilsen
McCorkle et al.; "Physical Properties of an Electron Beam-Sliding Spark Device"; Rev. Sci. Instrum; vol. 48, No. 8; Aug. 1977; pp. 1055-1063.
T. Tomie, et al., "Three-Dimensional Readout of Flash X-ray Images of Living Sperm in Water by Atomic-Force Microscopy", May 3, 1991, pp. 691-693.
C. Chenais-Popovics et al., "Laser Amplification at 18.2 nm in Recombining Plasma from a Laser-Irradiated Carbon Fiber", Nov. 9, 1987, vol. 59, No. 19, pp. 2161-2164, Physical Review Letters.
Toshihisa Tomie et al., "Space Resolved Observation of Population Inversion, Electron Temperature, and Opacity of a Recombining Carbon Plasma", 1990, pp. 325-328, Inst. Phys. Conf. Ser. No. 116.
W. T. Silfvast et al., "Ultra-High-Gain Laser-Produced Plasma Laser In Xenon Using Periodic Pumping", Nov. 29, 1978, pp. 213-215, Appl. Phys. Lett. 34(3), Feb. 1, 1979.

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