Micro-mechanical actuator

Details Micro-mechanical actuator Micro-mechanical actuator

1997-04-07

2000-05-02

Lopez, F. Daniel

Expansible chamber devices

With lubricating means

Lubricant entrained by working fluid

921691, F01B 3110, F16J 1000

Patent

active

060558997

ABSTRACT:
In a micro-mechanical actuator having, disposed on a substrate, an actuator housing with a channel and a pressure chamber formed at one end of the channel, a piston with a guide rod projecting from one end and a piston rod projecting from the other end in the opposite directions is movably disposed in the channel and the rods are supported in slots formed in bearing blocks disposed at opposite ends of the piston for guiding the piston slideably in the channel, and a fluid admission and discharge passage extends through the substrate in the area of the pressure chamber whereby fluid can be admitted to, or removed from, the pressure chamber for actuating the piston.

REFERENCES:
patent: 3611880 (1971-10-01), Gulick
patent: 5362213 (1994-11-01), Komatsu et al.
Yasushi et al., "Fluid Driven Nicroactuator with Feedback Mechanism", Feb. 7, 1993, Proccedings of the Workshop on Micro Electro Mechanical Systems, pp. 213-218.

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