Electronic bombardment evaporator equipped with means to recover

Electric heating – Metal heating – By arc

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21912115, B23K 1500

Patent

active

049580590

ABSTRACT:
Electronic bombardment evaporator equipped with means to recuperate backscattered electrons by a target (14) submitted to a bombardment by an electronic beam (12) comprising means to collect the backscattered electrons, said means (26) being brought to a Vc potential so that the electrons backscattered by the target (14) are attracted by said means (26), and a power source (30) connected firstly to the means (26) to collect the backscattered electrons and polarizing them to the VC potential, and secondly to the main power source (18) of the electron gun (10), supplying the latter with the intensity Ic originating from the recuperation of the backscattered electrons.

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Thin Solid Films, vol. 110, No. 2, Dec. 1983, pp. 149-164, Elsevier Sequoia/Printed in the Netherlands, Lausanne, CH; S. Schiller et al.

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