Method of carrying objects into and from a furnace, and apparatu

Details Method of carrying objects into and from a furnace, and apparatu Method of carrying objects into and from a furnace, and apparatu

1988-11-18

1989-12-26

Myracle, Jerry W.

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

414161, G01B 530

Patent

active

048889946

ABSTRACT:
A method of carrying a boat, on which a number of wafers are mounted, into and from a furnace using a soft-landing loader having a fork. In this method, before loading the boat into the furnace, the reaction applied on the fork at a specific point is measure while the fork is supporting the boat, and the reaction thus measured is stored in a memory. The fork is inserted into, then pulled out of the furance, thus loading the boat and leaving it within the furnace. The wafers are heat-treated within the furnace, then, the fork is inserted again, and raises the wafer boat within the furnace. The reaction applied on the fork at this time is measured, and compared with the value stored in the memory. When it is not equal to the value stored in the memory, the fork is lowered and moved slightly back or forth, and then raised again to support the boat, repeating this motion until the reaction applied on the fork becomes equal to the value stored in the memory. After the compared both reactions have been found equal, the fork is pulled out of the furnace, thereby unloading the boat therefrom.

REFERENCES:
patent: 3744650 (1973-07-01), Henebry et al.
patent: 4008815 (1977-02-01), Fisk
patent: 4439146 (1984-03-01), Sugita
patent: 4440538 (1984-04-01), Bowers
patent: 4468195 (1984-08-01), Sasaki et al.
patent: 4557657 (1985-12-01), Olson et al.
patent: 4620832 (1986-11-01), Cay
patent: 4671726 (1987-06-01), Thuen
patent: 4752219 (1988-06-01), Fisher, Jr.
Richard S. Rosler et al., "Automation in CVD Processing", Solid State Technology/ Jul. 1977, pp. 27-33.
W. C. Benzing and R. Fisk, "Automation in CVD Wafer Processing", Solid State Technology/Jan. 1975, pp. 39-42.

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