InP/InGaAs monolithic integrated demultiplexer, photodetector, a

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Light responsive structure

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257197, 257432, 257458, H01L 310328, H01L 310336, H01L 31072, H01L 31109

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active

056891229

ABSTRACT:
The present invention relates to a monolithic integrated demultiplexing photoreceiver that is formed on a semi-insulating InP substrate. A frequency routing device is formed on the substrate and includes a first plurality of In/InGaAs semiconductor layers. At least one p-i-n photodiode is also formed on the substrate and includes a second plurality of InP/InGaAs semiconductor layers. Additionally, at least one single heterostructure bipolar transistor is formed on the substrate and includes a third plurality of InP/InGaAs semiconductor layers. At least one layer from each of the first, second and third plurality of layers are substantially identical to one another.

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patent: 5557117 (1996-09-01), Matsuoka et al.
Y. Kanabar and N. Baker "Demonstration of Novel Optical Multichannel Grating Demultiplexer Receiver (MGD) for HDWDM Systems" Electronics Letters, Jun. 22, 1989, vol. 25, No. 13, pp. 817-819.
S. Chandrasekhar et al. "Monolithic Integrated Waveguide Photodetector", Electronics Letters, May 7, 1987, vol. 23, No. 10, pp. 501-502.
M. R. Amersfoort et al. "Low-Loss Phased-Array Based 4-Channel Wavelength Demultiplexer Integrated with Photodetectors", IEEE Photonics Technology Letters, vol. 6, No. 1, Jan. 1994, pp. 62-64.
J.-M. Verdiell et al. "A WDM Receiver Photonic Integrated Circuit with Net On-Chip Gain", IEEE Photonics Technology Letters, vol. 6, No. 8, Aug. 1994, pp. 960-962.
S. Chandrasekhar et al. "Integrated Waveguide p-i-n Photodetector by MOVPE Regrowth", IEEE Electron Device Letters, vol. EDL-8, No. 11, Nov. 1987, pp. 512-514.
M. R. Amersfoort et al "8.times.2nm Polarization-Independent WDM Detector Based on Compact Arrayed Waveguide Demultiplexer" Technical Digest of the Integrated Photonics Research Conference, Feb. 1995, Dana Point, California, pp. PD3-1-PD3-2.

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