X-ray mirror and material

Details X-ray mirror and material X-ray mirror and material

1993-11-09

1995-09-26

Hannaher, Constantine

X-ray or gamma ray systems or devices

Specific application

Diffraction, reflection, or scattering analysis

378 85, 378 70, G21K 106

Patent

active

054540216

ABSTRACT:
An x-ray mirror material of high reflectance with a surface roughness which is very small and a high film density, the material being a Pt alloy film provided as a mirror surface for reflecting x-ray radiation. The composition of the mirror material is expressed by the general formula: Pt.sub.1-x M.sub.x. This material is deposited on a substrate surface which has been polished to a level form, where M is at least one substance selected from Mo, Ru, Rh, Pd, Ta, W, and Au, and x satisfies the formula: 0.005.ltoreq..times..ltoreq.0.10.

REFERENCES:
patent: 5077766 (1991-12-01), Schwenke et al.
patent: 5239566 (1993-08-01), Nakamura et al.
Haelbich, Rolf-Reter, "Smooth Multilayer Films Suitable For X-Ray Mirrors", Appl. Phys. Lett 34 (3), 1 Feb. 1, 1979.
Green, M. et al., "Scanning Tunneling Miroscopy of X-Ray Optics", pp. 429-430.
Nakajima, Kunio, et al., "Characteristics of Platinum-Palldium Alloy Film For X-Ray Mirrors", Jpn. J. Appl. Phys. vol. 32 (1993) pp. 1275-1278, Part 1. No. 3A, Mar. 1993.
European Search Report, dated May 27, 1994, Appl. No. EP 93 30 8928.

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