Composite condition detection apparatus for detecting static pre

Details Composite condition detection apparatus for detecting static pre Composite condition detection apparatus for detecting static pre

1996-11-22

1997-10-14

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Diaphragm

338 4, 374143, G01L 906, G01L 122, G01K 108

Patent

active

056774931

ABSTRACT:
In a multiple function type differential pressure sensor including a semiconductor chip having a differential pressure detector for detecting a differential pressure, temperature detector for detecting a temperature, and static pressure detector for detecting a static pressure provided on a semiconductor substrate of a single chip, two or more pairs of differential pressure detectors means are incorporated, and a difference between outputs of the two or more pairs of differential pressure detectors is fetched out.

REFERENCES:
patent: 5259248 (1993-11-01), Ugai et al.

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