Integrated circuitry having a pair of adjacent conductive lines

Details Integrated circuitry having a pair of adjacent conductive lines Integrated circuitry having a pair of adjacent conductive lines

1995-12-27

1997-10-14

Niebling, John

Fishing, trapping, and vermin destroying

437228, 437927, 1566571, H01L 2144

Patent

active

056772416

ABSTRACT:
A method of forming integrated circuitry includes, a) providing a pair of spaced and adjacent electrically conductive elongated lines; and b) providing electrically insulative material over the pair of spaced lines in a manner which leaves an elongated void between the lines, the elongated void being top sealed along its substantial elongated length. Preferably, the electrically insulative material is provided by depositing electrically insulative material over the pair of lines in a manner which produces a retrograde cross-sectional profile of the insulating material relative to the respective line sidewalls and which leaves an elongated top sealed void within the insulating material between the lines, the elongated void being open at at least one end. The void at the one end is subsequently sealed. Integrated circuitry of the invention included, i) a pair of spaced and adjacent electrically conductive elongated lines; and ii) the pair of conductive lines being encapsulated with an electrically insulative material, a top sealed elongated void provided relative to the electrically insulative material between the lines facilitating electrical isolation of the lines from one another.

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