Color charge-coupled device and method of manufacturing the same

Fishing – trapping – and vermin destroying

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Details

437 53, 257432, 359619, H01L 3118, H01L 31232, H01L 2170, G02F 129

Patent

active

056772009

ABSTRACT:
A method of manufacturing a color charge-coupled device is disclosed including the steps of alternately forming a plurality of light detectors corresponding to first to third colors and a plurality of charge transmission regions on a semiconductor substrate; forming a pad on one side of the substrate excluding a portion where the light detectors and charge transmission regions are formed; forming a planarizing film on the substrate excluding the pad; coating a microlens material on the planarizing film and patterning the microlens material so as to be left only on the planarizing film above the light detectors; thermally flowing the microlens material, to thereby form microlenses on the planarizing film above the light detectors; and hard-baking first to third dyeing layer, to thereby form first to third color filter layers on each microlens excluding the edge portion.

REFERENCES:
patent: 5321297 (1994-06-01), Enomoto
patent: 5444277 (1995-08-01), Nakai et al.
patent: 5466612 (1995-11-01), Fuse et al.
patent: 5534720 (1996-07-01), Song et al.
patent: 5605783 (1997-02-01), Revelli et al.

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