Method for reducing corrosion of a metal surface containing at l

Details Method for reducing corrosion of a metal surface containing at l Method for reducing corrosion of a metal surface containing at l

1991-05-01

1995-09-26

Beck, Shrive

Fishing, trapping, and vermin destroying

437197, 437198, H01L 2144

Patent

active

054534011

ABSTRACT:
A method is provided for reducing corrosion of metal surfaces that are comprised of at least aluminum and copper. An organic mask is exposed with a pattern. The organic mask is then subsequently developed, thereby producing open areas in the organic mask that expose portions of the metal surfaces. Applying a solution of hydrogen peroxide to the exposed metal surface, thereby creating a protective film prior to rinsing the exposed metal surface in an aqueous solution.

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Silicon Processing for the VLSI era, S. Wolf et al., Lattice Press, Sunset Bench, Calif. pp. 563-564, 1987.

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