Fishing – trapping – and vermin destroying
Patent
1992-01-16
1993-12-28
Quach, T. N.
Fishing, trapping, and vermin destroying
437 38, 437 39, 437174, 437175, 437944, 437911, 437984, 148DIG100, H01L 21338
Patent
active
052739180
ABSTRACT:
The invention relates to a process for producing a junction field effect transistor in which the surface layer provided for conducting the current has a reduced cross-section in the channel area. The gist of the invention is that a photoresist mask is applied to the surface layer of the first conductivity type which is initially of uniform thickness. The surface layer is removed to a residual thickness through an opening in the photoresist mask. Impurities are then implanted into the surface layer through the same opening in the aforesaid mask to produce a zone of the second or opposite conductivity type. Finally, the aforementioned mask is used as a contacting mask for the manufacture of the gate electrode.
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Quach T. N.
TEMIC Telefunken microelectronic GmbH
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