Method of producing semiconductor wafer

Details Method of producing semiconductor wafer Method of producing semiconductor wafer

1995-12-26

1998-04-28

Ruggiero, Joseph

Boots, shoes, and leggings

36446807, G06F 1900

Patent

active

057453640

ABSTRACT:
A system for producing a semiconductor wafer includes a production progress comparing/calculating unit, a fabrication device status monitor step, an inventory control step, and a process shelf controller step. In response to a timing signal from the fabrication device status monitor step, the production progress comparing/calculating unit determines a semiconductor wafer to be processed next, and the determined semiconductor wafer is automatically searched for on a process shelf. The fabrication devices of a semiconductor wafer production line start processing semiconductor wafers at suitable times thereby producing semiconductor wafers according to a production plan and meeting a delivery time for the semiconductor wafers.

REFERENCES:
patent: 4459663 (1984-07-01), Dye
patent: 5170355 (1992-12-01), Hadavi et al.
patent: 5282139 (1994-01-01), Kobayashi
patent: 5341302 (1994-08-01), Connors et al.
patent: 5375061 (1994-12-01), Hara et al.
patent: 5402350 (1995-03-01), Kline

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